Carbonyl Fluoride

Carbonyl fluorine, also known as fluorophosgene, is a fluorine-containing, non-flammable, toxic gas with a chemical formula of CF2O. It is mainly used as cleaning gas and etching gas in semiconductor manufacturing equipment, and can also be used as intermediate and fluorinating agent in organic synthesis.

Get A Quote

Category: Fluorinated Fine Chemicals

Specification of Carbonyl Fluoride

Technical Properties

Component	Unit	Property
Carbonyl Fluoride(CF₂O)	wt%	≥99.0
Trifluoroacetyl Fluoride	wt%	≤0.5
Other	wt%	≤0.5

Physical and Chemical Properties

Item	Unit	Index
Chemical Name	---	Carbonyl Fluoride
CAS	---	353-50-4
Molecular Formula	---	CF₂O
Structural Formula	---
Molecular Weight	g/mol	66.01
Boiling Point	℃	-84
Critical Temperature	℃	22.8
Liquid Density（-114℃）	g/ml	1.14

Packaging of Carbonyl Fluoride

This product is filled in steel cylinders or transportation tanks. The packaging specification of the steel cylinder is 1000 kg/1000 L, and the filling ratio of the steel cylinder is 0.5 kg/L; product tag and certificate of quality are attached outside of the steel cylinder or the transportation tank, indicating the brand, trademark, and batch number.

Notes of Carbonyl Fluoride

1)The product should be stored away from fire and heat sources to prevent overpressure; the storage place should be equipped with good ventilation device.

2)In hot weather, sun-proof and cooling measures should be taken for steel cylinders stored in the open air to prevent overpressure.

3)This product is transported as dangerous goods. Avoid heat or severe vibration during transportation.

Related Fluorinated Fine Chemicals